MTTC CLEANROOM - EQUIPMENT

The present set of equipment in the cleanroom includes:

Current tools in the MTTC Cleanroom

Manufacturer

Model

BAY 1 WEST

  
Super critical point dryer Tousimis
Automagasandri 915B
Solvent Bench  
Nanometrics Thin Film Measurement Tool    
Microscope (6 inch) with camera and internet connection Nikon
Optiphot 88
Single Wafer HMDS Oven    
Manual Coater Brewer Science
CEE 100
Hotplate Chemat Technoloty
KW-4AH
Blue M Oven Convection Oven    
Vacuum Oven    
Interfermeter Veeco Wyko
VT3300
Microscope (4 inch) Nikon
Optiphot
   

BAY 1 EAST

  
Utility Bench (8-foot)  
Particle Counter Cilmet
Acid Bench Santa Clara Plastics
Spin Rinse Dryer (double stack) Verteq
Superclean 1600
Caustic Bench with KOH bath Santa Clara Plastics
Contact Aligner with back side align capability Karl Suss MA6
MA6
   

BAY 2 WEST

  
Nikon Microscope and camera hooked to internet Mask inspection station underside lighting Nikon
Optiphot
Au Vacuum Evaporator    
Spin Rinse Dryer (double stack) Verteq
Superclean 1600
RCA Clean Bench Santa Clara Plastics
AJA sputter System 3 DC magnetron guns, 2 RF magnetron guns, RF to chuck and Interactive gasses  
Bell Jar Vacuum Evaporator Veeco
VE 776
   

BAY 2 EAST

  
Four Point Probe  
Jandel

6 Tube Diffusion system
   Oxidation wet and dry Tube
   N-Dope and Drive Tube
   P-Dope and Drive Tube
   CVD Low Temperature
         Oxide Deposition Tube
   CVD PolySilicon Deposition Tube
   CVD Silicon Nitride Deposition Tube

 Steed
Mustang
Parylene Coater Specialty Coating System
PDS 2010
DRIE etcher Alcatel
AMS 100
     

BAY 3 WEST

    
RIE Plasma Etcher March Plasma
CA 1701
     

BAY 3 EAST

    
Ellispometer Ruldolph
Auto El VI
Spin Disk Confocal Microscope    
     

BAY 4 WEST

  
Nikon microscope and camera hooked to internet 6 inch wafers Nikon  
Contact Aligner with deep uv mirrors OAI 500
500
Developer Bench    
     

BAY 4 EAST

  
CEE Coater    
Single Wafer HMDS Oven    
   
METROLOGY ROOM    
SEM AMRAY